AL-X

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AL-X Processing Guidelines

Process for 16 ┬Ám thick AL-X 2030

  1. Remove 100 gram container AGC AL-X 2030 from -40 C freezer, 1 hour prior to spinning
  2. Dehydration bake wafers at 120 C for 30 minutes
  3. Apply AGC AP903 adhesion promoter statically, and spin at 500 rpm for 5 seconds followed by 2500 RPM for 30 seconds
  4. Bak on a hotplate at 100 C for 90 seconds
  5. Using two eyedroppers, squeeze to remove air and immerse in 100 gram container of AL-X 2030
    1. spread to include 70% of a 4 inch wafer area
    2. Spin at 500 RPM for 5 seconds, followed by 2000 RPM for 30 seconds and then spin at 2000 RPM at 15 seconds for 15 seconds (apply Edge Bead remover)
  6. Bake at 60C for 90 seconds
  7. Transfer sample to vacuum/Nitrogen YES oven and cure for 2 hours. (Program 5)

The datasheet for AL-X can be found here: File:ALX Data Sheet.pdf

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