Sputtering Rates

From FAST Wiki
Jump to: navigation, search

Amorphous Silicon

Sputter Rates For Silicon
Time (Seconds) Thickness (um)
D.C. Power (W) 1 2
R.F. Power (W) 2 4 6
N2 Flow Rate (Sccm) 3 6 9
Sputter Pressure (Torr) 4 8 12
5 5 10 15

Headline text

Headline text

==
Personal tools
Namespaces

Variants
Actions
Navigation
Toolbox